Delayed Discharge Bridging Two Sputtering Modes from Modulated Pulsed Power Magnetron Sputtering (MPPMS) to Deep Oscillation Magnetron Sputtering (DOMS)
نویسندگان
چکیده
Delayed discharges due to electrical breakdown are observed in modulated pulsed pow er magnetron sputtering (MPPMS) plasma of titanium. The delayed discharge, which is remarkable with decreasing argon gas pressure, transforms the discharge current waveform from a standard comb-like consisting several pulses high power. In addition, delay times, statistical times and formative MPPMS discharges, experimentally measured help Laue plot analysis. pressure dependence indicates that behavior matches characteristics well. present study, dynamics waveform, can be origin deep oscillation sputtering, investigated based on measurement waveforms.
منابع مشابه
High power impulse magnetron sputtering discharge
J. T. Gudmundsson, N. Brenning, Daniel Lundin and Ulf Helmersson, High power impulse magnetron sputtering discharge, 2012, Journal of Vacuum Science & Technology. A. Vacuum, Surfaces, and Films, (30), 030801. http://dx.doi.org/10.1116/1.3691832 Copyright: American Vacuum Society, This article may be downloaded for personal use only. Any other use requires prior permission of the author and the ...
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ژورنال
عنوان ژورنال: Plasma
سال: 2021
ISSN: ['2571-6182']
DOI: https://doi.org/10.3390/plasma4020016